AS600DMTG
  AS6D4B2
  ProPower1100D5XL
COMPUTER AUTOMATION ION PLATING MACHINE MODEL AS600DMTG
      Computer automation ion plating machines model AS600DMTG are batch type thin film physical vapor deposition equipment with 4 to 6 set large rectangular unbalanced magnetron sputtering sources, 3 set cathodic arc ion evaporators and 2 set large rectangular gas ion sources (no grid no filament). These sources could be used to coat pure metals and alloys in one application to obtain single or multi-layer chemical reactive and metallic films on a great range of industrial products. Such as technical coatings on cutting and forming tools, construction materials, aviation / navigation / military equipment and others, or very high quality decorative coatings on watchcases and watchbands, glass frames, leather bag and suitcase accessories, pen accessories and works of arts, in order to reach better or different characteristics (physical, chemical, mechanical, optical, color and so on).


Advantages:
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Ideal size of chamber for small and medium size work-piece coating applications.
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Coatings both for technical purposes (2-5μ) and for top standard decorative purposes (1-2μ) with up to 4 different pure metal or alloy target materials and 4 different reaction gasses. The final surface finish of the layer is guaranteed without micro-droplet.
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Vacuum chamber with a front door and two side doors suitable for manual loading and unloading of work-piece and convenient for MS source maintenance and target replacment.
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10 satellite rotation hooks for work-piece loading space of 130mm in diameter each. Large loading capacity.
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Magnetron sputtering sources (MS5-6) mounted side by side on the front door with separate shutters for target surface poisoning protection and pre-sputtering cleaning.
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3 advanced cathodic arc ion evaporators (RCAE1047) for substrate etching and inter-layer deposition in order to greatly improve the film adhesion
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2 large rectangular gas ion sources (no grid no filament) near the front door for maintenance convenience to provide ionized gasses for better chemical reactive deposition with 4 MS sources (MS1-4).
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In each coating recipe up to 30 coating steps available for accurate parameter setting together with unlimited periodic nano-film coatings;
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The third vacuum control mode with the stepping motor driven throttle valve is to reach the most accurate vacuum control when gas mass flow rates and vacuum condition are set during coating process.
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Each channel cooling water flow rate and temperature at outlet are monitored to guarantee that the whole system cannot be damaged by without cooling water, especially the MS sources, the CAEs and the diffusion pump.
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The work-piece temperature could be preset and automatically controlled step by step during coating process up to 450°C or higher
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Process accuracy, reliability and repeatability are guaranteed by the automatic computer control system, resulting in much higher consistency of production and much better film quality.
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Automatic preheating of the system in the morning 7 days a week and automatic cooling and then shut down of the system in the evening.
● 1 Turbo molecular pump, 1 Roots pump and 2 Leybold rotary mechanical pumps to reach higher running stability, less maintenance time and smaller occupation space, as well as much less diffusion pump preheating and cooling down times.
● Greatly reduced requirements for the operators' experience and technical background. Simpler and easier installation, test running, routine maintenance and technical training.
● Strictly following the CE standards and norms in designing and manufacture. Completely new structures of central control cabinets and power cabinets.
基本特性

Vacuum Chamber Inner Size 800x1000mm2
Effective Coating Space 600x600 mm2
Ultimate Vacuum Pressure (at room temperature) 3.0 x 10-4 Pa
Pump Down Time (from atmosphere down to 4x10-3Pa empty chamber at room temperature) < 15 min
Turbo molecular pump（3500/400） 1 set
Leybold single stage rotary vane mechanical pump（SOGEVAC SV200） 1 set
Leybold double stage rotary vane mechanical pump（TRIVAC D16C） 1 set
Bias SCR DC output power supply（30 kVA） 4-6 sets
Large rectangular unbalanced magnetron sputtering source (LMO717/115) and DC SCR power supply (MS3075) 3 sets
Cathodic arc ion evaporator (RCAE1047) and advanced inverter DC power supply (CAE-150) 2 sets
Large rectangular gas ion source(no grid no filament) (LGIS830/102) and AE inverter DC power supply（PNCL6/6 400） 1 set
Microprocessor control complex vacuum meter
Ionization vacuum gauge（ZJ-27）Thermocouple vacuum gauge (ZJ-54B)		 1 set
10-10-5Pa
1000-1 Pa
Gas mass flow control system 4 channels
Central control cabinet with PLC 1 set
Power output control cabinet 1 set
Industrial control computer in IPC cabinet 1 set
HP color ink jet printer in the IPC cabinet 1 set
Two sets of cooling water systems in a separate service cabinet: flow rate, pressure and temperature at outlet 3.0 Ton/hr, 2.0kg/cm2, 205C
3.0 Ton/hr, 2.0kg/cm2, 5 or 30C
Total electric consumption 80 kVA (3-phase & 5 wire system, 380-400v, 50-60Hz)
Space occupation 6.4 x 5 x 3.5 m3
Coating cycle 180 min or more (Technical)
50 min or more (Decorative)
Application Technical and top standard decorative coating applications


APPLICATION
● For different technical coatings like TiN, TiC, ZrN, TiCN, CrN, ZrN, TiAlN, AlTiN, IPS, TiO2, ZrO2 etc. both for technical and decorative purposes;
● Coatings on temperature sensitive materials like plastic piece.
● Potential coating applications like Me-DLC, DLC and tribological coatings.
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