1、
Each coater is equipped with 2 group cathodic
arc ion evaporators (6 sets or 10 sets) and 2
pair unbalanced rectangular magnetron sputtering
sources with up to 4 different kinds of metal
or alloy target attachable at the same time. Its
great flexibility meets the needs of multi-layer
coating applications.
2、 Cathodic arc ion evaporator model
RACE1047 (Φ100mm) is of high reliability -- insulation
characteristic, arc discharge stability at high
vacuum and low current conditions. (Fig.1 and
2) (Prochina’s know-how).
3、 The unbalanced close-magnetic-field
face to face configuration designed by ProChina
has been proved of greatly enhanced plasma density
in deposition region, resulting in better evenness
and higher adhesion of coated films.
4、 4-channel gas mass flow control system
together with 6-channel reactive gas distribution
system, meets the needs of all kinds of coating
applications.
5、 On each vacuum evacuation system,
a by-pass vacuum valve system with a stepping
motor driving throttle valve is attached, resulting
in three vacuum control modes available: Mode
0 - vacuum setting preferential; Mode 1 - gas
mass flow rate setting preferential; Mode 2 -
vacuum and gas mass flow rates are both setting,
the evacuation speed is controlled by adjusting
stepping motor driving throttle valve. Under Mode
2 our coater can reach the highest vacuum control
accuracy and reduce the interference on coating
consistency of unpredicted work-piece de-gassing
and other factors. (ProChina’s know-how) (Fig.3)
6、 On each oil diffusion pump a temperature
sensor is attached and a temperature control unit
is to automatically stabilize the pump working
condition. Roots pump connected directly with
its roughing pump is driven by a frequency inverter
power unit and switched on and off at same time
together with the roughing pump in order to accelerate
the evacuation process and prolong its life time.
(ProChina’s patent)
7、 All AS and ProPower series ion plating
machines adopt the automation system of PLC (Lower
PC) and IPC (Upper PC) structure. One central
control cabinet is with complete control panels,switches,
knobs and meters for manual operation. The operator
– machine friend interface on IPC provides: to
prepare and manage a coating recipe list, to on-line
monitor the machine operation and to provide on-line
manual help and explain reasons and trouble shooting
suggestions when the equipment is in alarm, to
collect on-line physical data and store them into
hard disc, and so on. The whole ion plating machine
is high in running reliability, in process control
accuracy and in consistency of coated films and
their colors.(Fig.4) |